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Paper: Silicon CCD optimized for near infrared wavelengths
Volume: 8, CCDs in Astronomy
Page: 111
Authors: Schempp, W. V.
Abstract: A research project was undertaken to improve the near-IR sensitivity of the PM512 CCD. The specific goal was to achieve greater than 60 percent quantum efficiency at a wavelength of 9000 A, without significantly reducing the contrast transfer function of the CCD. The approach involved three steps. First, the CCD made from a thick, high resistivity epitaxial material. Second, the CCD thinned to allow for backside illumination and the effective use of the third step, an antireflection coating.
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