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Paper: CCD thinning, coating, and mounting research for astronomy
Volume: 8, CCDs in Astronomy
Page: 65
Authors: Lesser, M. P.
Abstract: Recent research efforts aimed at optimizing CCDs after their manufacture to achieve maximum quantum efficiency, wide spectral bandpass, and excellent cosmetics and surface flatness are discussed. Results of CCD thinning for backside illumination, backside charging for increased blue and UV response, and antireflection coating for increased QE are presented at all wavelengths. A research effort is discussed in which CCDs are mounted by bump bonding to silicon substrates for later thinning in order to increase yield, obtain very flat imaging surfaces, and allow close packing for focal plane mosaics.
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